Original language | Undefined/Unknown |
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Pages (from-to) | 339-342 |
Number of pages | 4 |
Journal | Thin Solid Films |
Volume | 395 |
Publication status | Published - 2001 |
Hot-wire silicon nitride for thin-film transistors
B. Stannowski, J.K. Rath, R.E.I. Schropp
Research output: Contribution to journal › Article › Academic › peer-review