Hot-wire silicon nitride for thin-film transistors

B. Stannowski, J.K. Rath, R.E.I. Schropp

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined/Unknown
Pages (from-to)339-342
Number of pages4
JournalThin Solid Films
Volume395
Publication statusPublished - 2001

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