Hot-wire produced atomic hydrogen: effects during and after amorphous-silicon deposition

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@article{9ed929dbdcce406a96ed922170fda581,

title = "Hot-wire produced atomic hydrogen: effects during and after amorphous-silicon deposition",

author = "A.M. Brockhoff and \{van der Weg\}, W. and F.H.P.M. Habraken",

year = "2001",

language = "Undefined/Unknown",

volume = "395",

pages = "87--91",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier BV",

number = "1-2",

}