Hot-wire produced atomic hydrogen: effects during and after amorphous-silicon deposition

A.M. Brockhoff, W. van der Weg, F.H.P.M. Habraken

Research output: Contribution to journal › Article › Academic › peer-review

Cite this

@article{9ed929dbdcce406a96ed922170fda581,

title = "Hot-wire produced atomic hydrogen: effects during and after amorphous-silicon deposition",

author = "A.M. Brockhoff and {van der Weg}, W. and F.H.P.M. Habraken",

year = "2001",

language = "Undefined/Unknown",

volume = "395",

pages = "87--91",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "1-2",

}