High Temperature n- and p-type doped microcrystalline silicon layers grown by VHF PECVD Layer-by-Layer Deposition

Research output: Contribution to conference › Paper › Other research output

Original language	Undefined/Unknown
Publication status	Published - 30 Sept 2003
Event	National Zonnecellendag - Utrecht Duration: 30 Sept 2003 → …

National Zonnecellendag

Cite this

@conference{c5f042eb7db346a991f36269f13f2916,

title = "High Temperature n- and p-type doped microcrystalline silicon layers grown by VHF PECVD Layer-by-Layer Deposition",

author = "A. Gordijn and J.K. Rath and R.E.I. Schropp",

note = "National Zonnecellendag; National Zonnecellendag ; Conference date: 30-09-2003",

year = "2003",

month = sep,

day = "30",

language = "Undefined/Unknown",

}