High growth rate and gas utilisation in a-Si:H solar cells made with amplitude modulated VHF-CVD

J.K. Rath, A.C.W. Biebericher, R.E.I. Schropp, W. van der Weg, W.J. Goedheer

Research output: Contribution to conference › Paper › Other research output

Original language	Undefined/Unknown
Publication status	Published - 2003
Event	Proc. WCPEC3 - Osaka, JApan Duration: 1 Jan 2003 → …

Proc. WCPEC3

Cite this

@conference{9cc82f037f8747318a1a6329d9bb8754,

title = "High growth rate and gas utilisation in a-Si:H solar cells made with amplitude modulated VHF-CVD",

author = "J.K. Rath and A.C.W. Biebericher and R.E.I. Schropp and {van der Weg}, W. and W.J. Goedheer",

note = "Proc. WCPEC3; Proc. WCPEC3 ; Conference date: 01-01-2003",

year = "2003",

language = "Undefined/Unknown",

}