High-energy ion-beam-induced phase separation in SiOx films

W.M. Arnoldbik, N. Tomozeiu, E.D. van Hattum, R.W. Lof, A.M. Vredenberg

Research output: Contribution to journalArticleAcademicpeer-review

Original languageEnglish
Pages (from-to)125329
Number of pages7
JournalPhysical review. B, Condensed matter and materials physics
Volume71
Issue number12
Publication statusPublished - 2005

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