Gas phase considerations for the deposition of thin film silicon solar cells by VHF-PECVD at low substrate temperatures

J.K. Rath; A.D. Verkerk; M. Brinza; R.E.I. Schropp; W.J. Goedheer; V.V. Krzhizhanovskaya; Y.E. Gorbachev; K.E. Orlov; E.M. Khilkevitch; A.S. Smirnov

Gas phase considerations for the deposition of thin film silicon solar cells by VHF-PECVD at low substrate temperatures

J.K. Rath
, A.D. Verkerk
, M. Brinza
, R.E.I. Schropp
, W.J. Goedheer
, V.V. Krzhizhanovskaya
, Y.E. Gorbachev
, K.E. Orlov
, E.M. Khilkevitch
, A.S. Smirnov

extern

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined/Unknown
Title of host publication	33rd IEEE Photovolatic Specialists Conference 2008 : Proceedings : San Diego, CA, May 11 - 16, 2008
Place of Publication	Piscataway
Publisher	IEEE
Publication status	Published - 11 May 2008

Bibliographical note

PVSC '08

Cite this

Rath, J. K., Verkerk, A. D., Brinza, M., Schropp, R. E. I., Goedheer, W. J., Krzhizhanovskaya, V. V., Gorbachev, Y. E., Orlov, K. E., Khilkevitch, E. M., & Smirnov, A. S. (2008). Gas phase considerations for the deposition of thin film silicon solar cells by VHF-PECVD at low substrate temperatures. In 33rd IEEE Photovolatic Specialists Conference 2008 : Proceedings : San Diego, CA, May 11 - 16, 2008 IEEE.

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title = "Gas phase considerations for the deposition of thin film silicon solar cells by VHF-PECVD at low substrate temperatures",

author = "J.K. Rath and A.D. Verkerk and M. Brinza and R.E.I. Schropp and W.J. Goedheer and V.V. Krzhizhanovskaya and Y.E. Gorbachev and K.E. Orlov and E.M. Khilkevitch and A.S. Smirnov",

note = "PVSC '08",

year = "2008",

month = may,

day = "11",

language = "Undefined/Unknown",

booktitle = "33rd IEEE Photovolatic Specialists Conference 2008 : Proceedings : San Diego, CA, May 11 - 16, 2008",

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Rath, JK, Verkerk, AD, Brinza, M, Schropp, REI, Goedheer, WJ, Krzhizhanovskaya, VV, Gorbachev, YE, Orlov, KE, Khilkevitch, EM & Smirnov, AS 2008, Gas phase considerations for the deposition of thin film silicon solar cells by VHF-PECVD at low substrate temperatures. in 33rd IEEE Photovolatic Specialists Conference 2008 : Proceedings : San Diego, CA, May 11 - 16, 2008. IEEE, Piscataway.

Gas phase considerations for the deposition of thin film silicon solar cells by VHF-PECVD at low substrate temperatures. / Rath, J.K.; Verkerk, A.D.; Brinza, M. et al.
33rd IEEE Photovolatic Specialists Conference 2008 : Proceedings : San Diego, CA, May 11 - 16, 2008. Piscataway: IEEE, 2008.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Gas phase considerations for the deposition of thin film silicon solar cells by VHF-PECVD at low substrate temperatures

AU - Rath, J.K.

AU - Verkerk, A.D.

AU - Brinza, M.

AU - Schropp, R.E.I.

AU - Goedheer, W.J.

AU - Krzhizhanovskaya, V.V.

AU - Gorbachev, Y.E.

AU - Orlov, K.E.

AU - Khilkevitch, E.M.

AU - Smirnov, A.S.

N1 - PVSC '08

PY - 2008/5/11

Y1 - 2008/5/11

M3 - Conference contribution

BT - 33rd IEEE Photovolatic Specialists Conference 2008 : Proceedings : San Diego, CA, May 11 - 16, 2008

PB - IEEE

CY - Piscataway

ER -