| Original language | Undefined/Unknown |
|---|---|
| Journal | Applied Physics Letters |
| Volume | 87 |
| Issue number | 071501 |
| Publication status | Published - 2005 |
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Gas heating in plasma-assisted sputter deposition
- A. Palmero Acebedo
- , H. Rudolph
- , F.H.P.M. Habraken
Research output: Contribution to journal › Article › Academic › peer-review