Gas heating in plasma-assisted sputter deposition

A. Palmero Acebedo, H. Rudolph, F.H.P.M. Habraken

Research output: Contribution to journal › Article › Academic › peer-review

Cite this

@article{e8c3fa96846d4b1db56f2c7cefc10cd2,

title = "Gas heating in plasma-assisted sputter deposition",

author = "{Palmero Acebedo}, A. and H. Rudolph and F.H.P.M. Habraken",

year = "2005",

language = "Undefined/Unknown",

volume = "87",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "071501",

}