Galvanic etch stop in KOH with reduced Au area using NaOCl

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Eurosensors Prague, Czech. Republic

Cite this

@inproceedings{b6b85d518c1643c7b1dc08e048d7a354,

title = "Galvanic etch stop in KOH with reduced Au area using NaOCl",

author = "E.J. Connolly and P.J. French and X.H. Xia and J.J. Kelly",

note = "Eurosensors Prague, Czech. Republic",

year = "2002",

month = sep,

day = "15",

language = "Undefined/Unknown",

pages = "443",

booktitle = "Proc. Eurosensors XVI",

}