Galvanic etch stop in KOH with reduced Au area using NaOCl

E.J. Connolly, P.J. French, X.H. Xia, J.J. Kelly

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined/Unknown
Title of host publicationProc. Eurosensors XVI
Pages443
Number of pages1
Publication statusPublished - 15 Sept 2002

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