Galvanic etch stop for Si in KOH

E.J. Connolly, P.J. French, X. Xia, J.J. Kelly

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1215-1219
Number of pages	5
Journal	Journal of Micromechanics and Microengineering
Volume	24
Issue number	8
DOIs	https://doi.org/10.1088/0960-1317/14/8/014
Publication status	Published - 2004

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title = "Galvanic etch stop for Si in KOH",

author = "E.J. Connolly and P.J. French and X. Xia and J.J. Kelly",

year = "2004",

doi = "10.1088/0960-1317/14/8/014",

language = "Undefined/Unknown",

volume = "24",

pages = "1215--1219",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

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TY - JOUR

T1 - Galvanic etch stop for Si in KOH

AU - Connolly, E.J.

AU - French, P.J.

AU - Xia, X.

AU - Kelly, J.J.

PY - 2004

Y1 - 2004

U2 - 10.1088/0960-1317/14/8/014

DO - 10.1088/0960-1317/14/8/014

M3 - Article

SN - 0960-1317

VL - 24

SP - 1215

EP - 1219

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 8

ER -