Experimental characterization of the deposition of silicon suboxide films in an radiofrequency magnetron reactive sputtering system

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	399-403
Number of pages	5
Journal	Surface & coatings technology
Volume	188-189
Publication status	Published - 2004

Cite this

@article{27c6d429d3354bd596a59e8b5b4ece2d,

title = "Experimental characterization of the deposition of silicon suboxide films in an radiofrequency magnetron reactive sputtering system",

author = "\{van Hattum\}, E.D. and \{Palmero Acebedo\}, A. and W.M. Arnoldbik and F.H.P.M. Habraken",

year = "2004",

language = "Undefined/Unknown",

volume = "188-189",

pages = "399--403",

journal = "Surface \& coatings technology",

issn = "0257-8972",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Experimental characterization of the deposition of silicon suboxide films in an radiofrequency magnetron reactive sputtering system

AU - van Hattum, E.D.

AU - Palmero Acebedo, A.

AU - Arnoldbik, W.M.

AU - Habraken, F.H.P.M.

PY - 2004

Y1 - 2004

M3 - Article

SN - 0257-8972

VL - 188-189

SP - 399

EP - 403

JO - Surface & coatings technology

JF - Surface & coatings technology

ER -