@article{c0b3bd5f6ad340a8b46e91413537a915,
title = "Etching AlAs with HF for epitaxial lift-off applications",
author = "M.M.A.J. Voncken and J.J. Schermer and \{van Niftrik\}, A.T.J. and G.J. Bauhuis and P. Mulder and P.K. Larsen and T.P.J. Peters and \{de Bruin\}, B. and A. Klaassen and J.J. Kelly",
year = "2004",
doi = "10.1149/1.1690293",
language = "Undefined/Unknown",
volume = "151",
pages = "G347--G352",
journal = "Journal of the Electrochemical Society",
issn = "0013-4651",
publisher = "Institute of Physics",
number = "5",
}