Original language | Undefined/Unknown |
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Pages (from-to) | G347-G352 |
Number of pages | 6 |
Journal | Journal of the Electrochemical Society |
Volume | 151 |
Issue number | 5 |
DOIs | |
Publication status | Published - 2004 |
Etching AlAs with HF for epitaxial lift-off applications
M.M.A.J. Voncken, J.J. Schermer, A.T.J. van Niftrik, G.J. Bauhuis, P. Mulder, P.K. Larsen, T.P.J. Peters, B. de Bruin, A. Klaassen, J.J. Kelly
Research output: Contribution to journal › Article › Academic › peer-review