Etching AlAs with HF for epitaxial lift-off applications

M.M.A.J. Voncken, J.J. Schermer, A.T.J. van Niftrik, G.J. Bauhuis, P. Mulder, P.K. Larsen, T.P.J. Peters, B. de Bruin, A. Klaassen, J.J. Kelly

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined/Unknown
Pages (from-to)G347-G352
Number of pages6
JournalJournal of the Electrochemical Society
Volume151
Issue number5
DOIs
Publication statusPublished - 2004

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