Original language | English |
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Journal | Journal of Applied Physics |
DOIs | |
Publication status | Published - 1992 |
Emission spectroscopy on a supersonically expanding argon/silane plasma
G.J. Meeusen, E.A. Ershov-Pavlov, R.F.G. Meulenbroeks, M.C.M. Van De Sanden, D.C. Schram
Research output: Contribution to journal › Article › Academic › peer-review