Emission spectroscopy on a supersonically expanding argon/silane plasma

G.J. Meeusen, E.A. Ershov-Pavlov, R.F.G. Meulenbroeks, M.C.M. Van De Sanden, D.C. Schram

Research output: Contribution to journalArticleAcademicpeer-review

Original languageEnglish
JournalJournal of Applied Physics
DOIs
Publication statusPublished - 1992

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