Electronics sputtering of thin SiO2 films by MeV heavy ions

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Journal	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Publication status	Published - 2002

Cite this

@article{b8866602be8a4f2a81d77b6fabd79036,

title = "Electronics sputtering of thin SiO2 films by MeV heavy ions",

author = "\{Arnold Bik\}, W.M. and N. Tomozeiu and F.H.P.M. Habraken",

year = "2002",

language = "Undefined/Unknown",

journal = "Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Electronics sputtering of thin SiO2 films by MeV heavy ions

AU - Arnold Bik, W.M.

AU - Tomozeiu, N.

AU - Habraken, F.H.P.M.

PY - 2002

Y1 - 2002

M3 - Article

SN - 0168-583X

JO - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

ER -