Electronic sputtering of silicon suboxide films by swift heavy ions

  • W.M. Arnoldbik
  • , P.A. Zeijlmans van Emmichoven
  • , F.H.P.M. Habraken

Research output: Contribution to journalArticleAcademicpeer-review

Original languageEnglish
Article number245504
Pages (from-to)1-4
JournalPhysical Review Letters
Volume94
Publication statusPublished - 2005

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