Electron-beam-induced deposition of platinum at low landing energies

A. Botman, D.A.M. de Winter, J.J.L. Mulders

Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2460-2463
Number of pages	4
Journal	Journal of vacuum science and technology. B, Microelectronics and nanometer structures
Volume	B26
Publication status	Published - 2008

Keywords

@article{5f4c24795f004bfdb3c2df33a767c73f,

title = "Electron-beam-induced deposition of platinum at low landing energies",

keywords = "Molecular biology, Life sciences, Cell biology, Biologie/Milieukunde (BIOL)",

author = "A. Botman and {de Winter}, D.A.M. and J.J.L. Mulders",

year = "2008",

language = "Undefined/Unknown",

volume = "B26",

pages = "2460--2463",

journal = "Journal of vacuum science and technology. B, Microelectronics and nanometer structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Electron-beam-induced deposition of platinum at low landing energies

AU - Botman, A.

AU - de Winter, D.A.M.

AU - Mulders, J.J.L.

PY - 2008

Y1 - 2008

KW - Molecular biology

KW - Life sciences

KW - Cell biology

KW - Biologie/Milieukunde (BIOL)

M3 - Article

SN - 1071-1023

VL - B26

SP - 2460

EP - 2463

JO - Journal of vacuum science and technology. B, Microelectronics and nanometer structures

JF - Journal of vacuum science and technology. B, Microelectronics and nanometer structures

ER -