Original language | Undefined/Unknown |
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Pages (from-to) | 20-24 |
Number of pages | 5 |
Journal | Journal of Non-Crystalline Solids |
Issue number | 299-302 |
Publication status | Published - 2002 |
Effect of Deuterium on the growth process of poly-silicon film by hot-wire deposition
J.K. Rath, R.E.I. Schropp
Research output: Contribution to journal › Article › Academic › peer-review