Effect of Deuterium on the growth process of poly-silicon film by hot-wire deposition

J.K. Rath, R.E.I. Schropp

Research output: Contribution to journalArticleAcademicpeer-review

Original languageUndefined/Unknown
Pages (from-to)20-24
Number of pages5
JournalJournal of Non-Crystalline Solids
Issue number299-302
Publication statusPublished - 2002

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