Detailed structural study of low temperature mixed-phase Si films by X-TEM and ambient conductive AFM

Research output: Contribution to journal › Meeting Abstract › Other research output

Original language	Undefined/Unknown
Pages (from-to)	1011-1015
Number of pages	5
Journal	Journal of Non-Crystalline Solids
Volume	352
Publication status	Published - 2006

Cite this

@article{05e8e3244eb7424b97fb833ca0817d12,

title = "Detailed structural study of low temperature mixed-phase Si films by X-TEM and ambient conductive AFM",

author = "T. Mates and P.C.P. Bronsveld and A. Fejfar and B. Rezek and J. Kocka and J.K. Rath and R.E.I. Schropp",

year = "2006",

language = "Undefined/Unknown",

volume = "352",

pages = "1011--1015",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Detailed structural study of low temperature mixed-phase Si films by X-TEM and ambient conductive AFM

AU - Mates, T.

AU - Bronsveld, P.C.P.

AU - Fejfar, A.

AU - Rezek, B.

AU - Kocka, J.

AU - Rath, J.K.

AU - Schropp, R.E.I.

PY - 2006

Y1 - 2006

M3 - Meeting Abstract

SN - 0022-3093

VL - 352

SP - 1011

EP - 1015

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

ER -