Deposition Techniques of Hydrogenated Amorphous Silicon using Modulated Radio-Frequency Plasmas

Research output: ThesisDoctoral thesis 1 (Research UU / Graduation UU)

Original languageUndefined/Unknown
QualificationDoctor of Philosophy
Awarding Institution
  • Utrecht University
Supervisors/Advisors
  • van der Weg, W., Primary supervisor, External person
  • Goedheer, W.J., Co-supervisor
Publication statusPublished - 2002

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