| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 645-650 |
| Number of pages | 6 |
| Journal | Materials Research Society Symposium - Proceedings |
| Volume | 467 |
| Publication status | Published - 1997 |
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Deposition of device quality amorphous silicon by hot-wire CVD
- K.F. Feenstra
- , C.H.M. van der Werf
- , E.C. Molenbroek
- , R.E.I. Schropp
- extern
Research output: Contribution to journal › Article › Academic › peer-review