Computer automation of the Pulse Reactor, a pulse operated low-pressure metal organic vapor phase epitaxy machine

W. G. J. H. M. van Sark; J. E. M. Hogenkamp; J. van Suchtelen; L. J. Giling

doi:10.1063/1.1141890

Computer automation of the Pulse Reactor, a pulse operated low-pressure metal organic vapor phase epitaxy machine

W. G. J. H. M. van Sark, J. E. M. Hogenkamp, J. van Suchtelen, L. J. Giling

Energy and Resources

University of Nijmegen

Research output: Contribution to journal › Article › Academic › peer-review

Abstract

A modular and thereby flexible software package has been developed to control and operate a recently designed Pulse Reactor, a new type of low-pressure metal organic vapor phase epitaxy (MOVPE) machine. The user-friendly software package allows the operator to grow complicated layer structures automatically, whereby the composition of the growth mixture for each growth pulse can be varied. The hardware consists of a VMEbus based microcomputer system in combination with a UNIFIVE [derived from UNIX■ system V (UNIX■ is a trademark of AT&T Bell Laboratories)] operating system. Interfacing with the reactor system is performed through the use of a Philips MIOS subsystem. The UNIFIVE operating system is modified so as to establish good real-time behavior. Multilayer structures consisting of several GaAs and AlGaAs layers have been grown with good results, demonstrating not only the reliability, the real time behavior, and the correctness of the software package, but also the quality of the Pulse Reactor itself.

Original language	English
Pages (from-to)	146-157
Journal	Review of Scientific Instruments
Volume	61
Issue number	1
DOIs	https://doi.org/10.1063/1.1141890
Publication status	Published - 1 Jan 1990

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10.1063/1.1141890

http://adsabs.harvard.edu/abs/1990RScI...61..146V

Cite this

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title = "Computer automation of the Pulse Reactor, a pulse operated low-pressure metal organic vapor phase epitaxy machine",

abstract = "A modular and thereby flexible software package has been developed to control and operate a recently designed Pulse Reactor, a new type of low-pressure metal organic vapor phase epitaxy (MOVPE) machine. The user-friendly software package allows the operator to grow complicated layer structures automatically, whereby the composition of the growth mixture for each growth pulse can be varied. The hardware consists of a VMEbus based microcomputer system in combination with a UNIFIVE [derived from UNIX■ system V (UNIX■ is a trademark of AT&T Bell Laboratories)] operating system. Interfacing with the reactor system is performed through the use of a Philips MIOS subsystem. The UNIFIVE operating system is modified so as to establish good real-time behavior. Multilayer structures consisting of several GaAs and AlGaAs layers have been grown with good results, demonstrating not only the reliability, the real time behavior, and the correctness of the software package, but also the quality of the Pulse Reactor itself.",

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AU - van Suchtelen, J.

AU - Giling, L. J.

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AB - A modular and thereby flexible software package has been developed to control and operate a recently designed Pulse Reactor, a new type of low-pressure metal organic vapor phase epitaxy (MOVPE) machine. The user-friendly software package allows the operator to grow complicated layer structures automatically, whereby the composition of the growth mixture for each growth pulse can be varied. The hardware consists of a VMEbus based microcomputer system in combination with a UNIFIVE [derived from UNIX■ system V (UNIX■ is a trademark of AT&T Bell Laboratories)] operating system. Interfacing with the reactor system is performed through the use of a Philips MIOS subsystem. The UNIFIVE operating system is modified so as to establish good real-time behavior. Multilayer structures consisting of several GaAs and AlGaAs layers have been grown with good results, demonstrating not only the reliability, the real time behavior, and the correctness of the software package, but also the quality of the Pulse Reactor itself.

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Computer automation of the Pulse Reactor, a pulse operated low-pressure metal organic vapor phase epitaxy machine

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