| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 2286-2291 |
| Number of pages | 6 |
| Journal | Physica Status Solidi B |
| Volume | 1 |
| Issue number | 9 |
| Publication status | Published - 2004 |
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Comparison of SiOx structure in RF sputtered samples
- S. Swart
- , E.D. van Hattum
- , W.M. Arnoldbik
- , F.H.P.M. Habraken
Research output: Contribution to journal › Article › Academic › peer-review