Comparison of SiOx structure in RF sputtered samples

S. Swart, E.D. van Hattum, W.M. Arnoldbik, F.H.P.M. Habraken

Research output: Contribution to journal › Article › Academic › peer-review

Cite this

@article{4b302763571c436a9eb1941563a32355,

title = "Comparison of SiOx structure in RF sputtered samples",

author = "S. Swart and {van Hattum}, E.D. and W.M. Arnoldbik and F.H.P.M. Habraken",

year = "2004",

language = "Undefined/Unknown",

volume = "1",

pages = "2286--2291",

journal = "Physica Status Solidi B",

issn = "0370-1972",

publisher = "John Wiley and Sons Inc.",

number = "9",

}