| Original language | Undefined/Unknown |
|---|---|
| Pages (from-to) | 432-424 |
| Number of pages | 9 |
| Journal | Current opinion in solid state & materials science |
| Volume | 6/5 |
| Publication status | Published - 2002 |
Chemical Vapor Deposition of Silicon Thin Films
R.E.I. Schropp
Research output: Contribution to journal › Article › Academic › peer-review