Characterization of the plasma in a radio-frequency magnetron sputtering system

A. Palmero Acebedo, E.D. van Hattum, W.M. Arnoldbik, A.M. Vredenberg, F.H.P.M. Habraken

Research output: Contribution to journal › Article › Academic › peer-review

Cite this

@article{ae9072e5bdd447388e8d72acee88e282,

title = "Characterization of the plasma in a radio-frequency magnetron sputtering system",

author = "{Palmero Acebedo}, A. and {van Hattum}, E.D. and W.M. Arnoldbik and A.M. Vredenberg and F.H.P.M. Habraken",

year = "2004",

language = "Undefined/Unknown",

volume = "95",

pages = "7611--7618",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "12",

}