Characterization of an Ar/O2 magnetron sputtering plasma using a Langmuir probe and an energy resolves mass spectrometer

A. Palmero Acebedo, E.D. van Hattum, H. Rudolph, F.H.P.M. Habraken

Research output: Contribution to journal › Meeting Abstract › Other research output

Cite this

@article{0197b17f10954e4ba064fae5353e82bd,

title = "Characterization of an Ar/O2 magnetron sputtering plasma using a Langmuir probe and an energy resolves mass spectrometer",

author = "{Palmero Acebedo}, A. and {van Hattum}, E.D. and H. Rudolph and F.H.P.M. Habraken",

year = "2006",

language = "Undefined/Unknown",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

}