TY - JOUR
T1 - Boron-doped hydrogenated microcrystalline silicon oxide (μc-SiOx:H) for application in thin-film silicon solar cells
AU - Lambertz, A.
AU - Finger, F.
AU - Holländer, B.
AU - Rath, J.K.
AU - Schropp, R.E.I.
PY - 2011
Y1 - 2011
N2 - We report on the development of p-type μc-SiOx:H material, in particular the relationship between the
deposition parameters and the material properties like band gap, electrical conductivity, and crystalline
volume fraction. The material was deposited from gas mixtures of silane, carbon dioxide and hydrogen by
RF-PECVD. The gas flows were varied systematically to evaluate their influence on the material properties.
An increase of the oxygen content in the material disturbs the crystalline growth. This can be counteracted
by appropriate hydrogen dilutions. Materials with a combination of reasonably high conductivity of
4×10−6 S/cm at a high optical band gap E04 of 2.56 eV and a refractive index of 1.95 are obtained. Applied
in single junction μc-Si:H pin solar cells the improved properties of the μc-SiOx:H p-layers are reflected in
higher quantum efficiency in the short wavelength range by 10% compare to cells without adding CO2 during
p-layer deposition.
AB - We report on the development of p-type μc-SiOx:H material, in particular the relationship between the
deposition parameters and the material properties like band gap, electrical conductivity, and crystalline
volume fraction. The material was deposited from gas mixtures of silane, carbon dioxide and hydrogen by
RF-PECVD. The gas flows were varied systematically to evaluate their influence on the material properties.
An increase of the oxygen content in the material disturbs the crystalline growth. This can be counteracted
by appropriate hydrogen dilutions. Materials with a combination of reasonably high conductivity of
4×10−6 S/cm at a high optical band gap E04 of 2.56 eV and a refractive index of 1.95 are obtained. Applied
in single junction μc-Si:H pin solar cells the improved properties of the μc-SiOx:H p-layers are reflected in
higher quantum efficiency in the short wavelength range by 10% compare to cells without adding CO2 during
p-layer deposition.
U2 - 10.1016/j.jnoncrysol.2011.12.047
DO - 10.1016/j.jnoncrysol.2011.12.047
M3 - Article
SN - 0022-3093
JO - Journal of Non-Crystalline Solids
JF - Journal of Non-Crystalline Solids
ER -