Avoiding a dusty plasma: OES profiles of VHF PECVD at low temperatures

M.M. de Jong; J. de Koning; J.K. Rath; R.E.I. Schropp

Avoiding a dusty plasma: OES profiles of VHF PECVD at low temperatures

M.M. de Jong, J. de Koning, J.K. Rath, R.E.I. Schropp

extern

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 28 Jan 2010
Event	12th Euregional Workshop on Novel Concepts for Future Thin-Film Silicon Solar Cells - Delft Duration: 28 Jan 2010 → 29 Jan 2010

Conference

Conference	12th Euregional Workshop on Novel Concepts for Future Thin-Film Silicon Solar Cells
City	Delft
Period	28/01/10 → 29/01/10

Cite this

@conference{9f9e0f862ef147849c2dbfab59fbc2f7,

title = "Avoiding a dusty plasma: OES profiles of VHF PECVD at low temperatures",

author = "{de Jong}, M.M. and {de Koning}, J. and J.K. Rath and R.E.I. Schropp",

note = "12th Euregional Workshop on Novel Concepts for Future Thin-Film Silicon Solar Cells; 12th Euregional Workshop on Novel Concepts for Future Thin-Film Silicon Solar Cells ; Conference date: 28-01-2010 Through 29-01-2010",

year = "2010",

month = jan,

day = "28",

language = "English",

}

TY - CONF

T1 - Avoiding a dusty plasma: OES profiles of VHF PECVD at low temperatures

AU - de Jong, M.M.

AU - de Koning, J.

AU - Rath, J.K.

AU - Schropp, R.E.I.

N1 - 12th Euregional Workshop on Novel Concepts for Future Thin-Film Silicon Solar Cells

PY - 2010/1/28

Y1 - 2010/1/28

M3 - Poster

T2 - 12th Euregional Workshop on Novel Concepts for Future Thin-Film Silicon Solar Cells

Y2 - 28 January 2010 through 29 January 2010

ER -