| Original language | English |
|---|---|
| Pages (from-to) | 392-398 |
| Number of pages | 7 |
| Journal | Surface & coatings technology |
| Volume | 188-189 |
| Publication status | Published - 2004 |
Argon plasma modelling in a RF magnetron sputtering system
A. Palmero Acebedo, E.D. van Hattum, W.M. Arnoldbik, F.H.P.M. Habraken
Research output: Contribution to journal › Article › Academic › peer-review