Original language | English |
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Pages (from-to) | 392-398 |
Number of pages | 7 |
Journal | Surface & coatings technology |
Volume | 188-189 |
Publication status | Published - 2004 |
Argon plasma modelling in a RF magnetron sputtering system
A. Palmero Acebedo, E.D. van Hattum, W.M. Arnoldbik, F.H.P.M. Habraken
Research output: Contribution to journal › Article › Academic › peer-review