Argon plasma modelling in a RF magnetron sputtering system

A. Palmero Acebedo, E.D. van Hattum, W.M. Arnoldbik, F.H.P.M. Habraken

Research output: Contribution to journalArticleAcademicpeer-review

Original languageEnglish
Pages (from-to)392-398
Number of pages7
JournalSurface & coatings technology
Volume188-189
Publication statusPublished - 2004

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