Anisotropic etching of silicon: an electrochemical perspective

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined/Unknown
Title of host publication	Proc. 3rd Workshop on Physical Chemistry of Wet Etching of Silicon
Pages	1
Number of pages	1
Publication status	Published - 2002

3rd Workshop on Physical Chemistry of Wet Etching of Silicon Nara, Japan

Cite this

@inproceedings{84ab4f9a2af045b4ad9167b4f97d1d46,

title = "Anisotropic etching of silicon: an electrochemical perspective",

author = "J.J. Kelly and X. Xia and A. Steckenborn",

note = "3rd Workshop on Physical Chemistry of Wet Etching of Silicon Nara, Japan",

year = "2002",

language = "Undefined/Unknown",

pages = "1",

booktitle = "Proc. 3rd Workshop on Physical Chemistry of Wet Etching of Silicon",

}