Original language | Undefined/Unknown |
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Title of host publication | Proc. 3rd Workshop on Physical Chemistry of Wet Etching of Silicon |
Pages | 1 |
Number of pages | 1 |
Publication status | Published - 2002 |
Anisotropic etching of silicon: an electrochemical perspective
J.J. Kelly, X. Xia, A. Steckenborn
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review