analysis of silicon suboxide films using MeV/amu heavy ions.

W.M. Arnoldbik, E.D. van Hattum, F.H.P.M. Habraken

Research output: Contribution to journalMeeting AbstractOther research output

Original languageUndefined/Unknown
JournalTijdschrift: tijdelijk onbekend
Publication statusPublished - 2006

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