An optical analysis tool for avoiding dust formation in VHF hydrogen diluted silane plasmas at low substrate temperatures

Keyphrases

• Dust 100%
• Dust Formation 100%
• Ultra-high Frequency 100%
• Low Substrate Temperature 100%
• Silane Plasma 100%
• Optical Analysis 100%
• Nanocrystalline 66%
• Hydrogen Dilution 66%
• Dust Particles 33%
• Thin-film Silicon Solar Cells 33%
• Cell Manufacturing 33%
• Thin-film Silicon 33%
• Silane 33%
• Hydrogen Plasma 33%
• Silicon Cells 33%
• Fabrication Methods 33%
• TEM Images 33%
• Silane Deposition 33%
• Optical Transmission Loss 33%
• High Frequency Power 33%
• Silicon Film 33%
• Viewport 33%
• Different Substrate Temperature 33%
• Electric Shunt 33%
• Method for Identification 33%
• In-situ Monitoring 33%
• In Situ Techniques 33%

Material Science

• Silicon 100%
• Silane 100%
• Nanocrystalline 66%
• Dilution 66%
• Film 33%
• Plasma Deposition 33%
• Thin-Film Silicon Photovoltaics 33%
• Dust Particle 33%
• Thin Films 33%

Engineering

• Substrate Temperature 100%
• Film Silicon 66%
• Hydrogen Dilution 66%
• Nanocrystalline 66%
• Thin Films 66%
• Silicon Cell 33%
• Film Silicon Solar Cell 33%
• Optical Transmission 33%