Amorphous silicon Thin Film Transistors deposited by VHF-PECVD and Hot-Wire CVD

W.J.J. Soppe; W.M.M. Kessels; M.C.M. van de Sanden; W.M. Arnold Bik; H. Schlemm; C. Devilee; H. Rieffe; S.E.A. Schiermeier; J.H. Bultman; B. Stannowski; A.W. Aand; R.E.I. Schropp; R.B. Wehrspohn; M. Powell

Amorphous silicon Thin Film Transistors deposited by VHF-PECVD and Hot-Wire CVD

W.J.J. Soppe, W.M.M. Kessels, M.C.M. van de Sanden, W.M. Arnold Bik, H. Schlemm, C. Devilee, H. Rieffe, S.E.A. Schiermeier, J.H. Bultman, B. Stannowski, A.W. Aand, R.E.I. Schropp, R.B. Wehrspohn, M. Powell

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Research output: Contribution to journal › Article › Academic › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1340-1344
Number of pages	5
Journal	Journal of Non-Crystalline Solids
Volume	299-302
Publication status	Published - 2002

Cite this

Soppe, W. J. J., Kessels, W. M. M., van de Sanden, M. C. M., Arnold Bik, W. M., Schlemm, H., Devilee, C., Rieffe, H., Schiermeier, S. E. A., Bultman, J. H., Stannowski, B., Aand, A. W., Schropp, R. E. I., Wehrspohn, R. B., & Powell, M. (2002). Amorphous silicon Thin Film Transistors deposited by VHF-PECVD and Hot-Wire CVD. Journal of Non-Crystalline Solids, 299-302, 1340-1344.

@article{2374320b75034589b7849c1b2f212f39,

title = "Amorphous silicon Thin Film Transistors deposited by VHF-PECVD and Hot-Wire CVD",

author = "W.J.J. Soppe and W.M.M. Kessels and {van de Sanden}, M.C.M. and {Arnold Bik}, W.M. and H. Schlemm and C. Devilee and H. Rieffe and S.E.A. Schiermeier and J.H. Bultman and B. Stannowski and A.W. Aand and R.E.I. Schropp and R.B. Wehrspohn and M. Powell",

year = "2002",

language = "Undefined/Unknown",

volume = "299-302",

pages = "1340--1344",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier",

}

TY - JOUR

T1 - Amorphous silicon Thin Film Transistors deposited by VHF-PECVD and Hot-Wire CVD

AU - Soppe, W.J.J.

AU - Kessels, W.M.M.

AU - van de Sanden, M.C.M.

AU - Arnold Bik, W.M.

AU - Schlemm, H.

AU - Devilee, C.

AU - Rieffe, H.

AU - Schiermeier, S.E.A.

AU - Bultman, J.H.

AU - Stannowski, B.

AU - Aand, A.W.

AU - Schropp, R.E.I.

AU - Wehrspohn, R.B.

AU - Powell, M.

PY - 2002

Y1 - 2002

M3 - Article

SN - 0022-3093

VL - 299-302

SP - 1340

EP - 1344

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

ER -