Above-CMOS a-Si and CIGS solar cells for powering autonomous microsystems

J. Lu, W. Liu, C.H.M. van der Werf, A.Y. Kovalgin, Y. Sun, R.E.I. Schropp, J. Schmitz

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review


Two types of solar cells are successfully grown on chips from two CMOS generations. The efficiency of amorphous-silicon (a-Si) solar cells reaches 5.2%, copperindium- gallium-selenide (CIGS) cells 7.1%. CMOS functionality is unaffected. The main integration issues: adhesion, surface topography, metal ion contamination, process temperature, and mechanical stress can be resolved while maintaining standard photovoltaic processing
Original languageEnglish
Title of host publicationElectron Devices Meeting (IEDM), 2010 IEEE International
Number of pages4
Publication statusPublished - 6 Dec 2010


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