Abstract
Two types of solar cells are successfully grown on chips
from two CMOS generations. The efficiency of
amorphous-silicon (a-Si) solar cells reaches 5.2%, copperindium-
gallium-selenide (CIGS) cells 7.1%. CMOS
functionality is unaffected. The main integration issues:
adhesion, surface topography, metal ion contamination,
process temperature, and mechanical stress can be
resolved while maintaining standard photovoltaic
processing
Original language | English |
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Title of host publication | Electron Devices Meeting (IEDM), 2010 IEEE International |
Publisher | IEEE |
Pages | 31.3.1-31.3.4 |
Number of pages | 4 |
DOIs | |
Publication status | Published - 6 Dec 2010 |