| Original language | Undefined/Unknown |
|---|---|
| Title of host publication | Proceedings IEEE MEMS 2003 |
| Place of Publication | Kyoto |
| Pages | 566 |
| Number of pages | 1 |
| Publication status | Published - 2003 |
A practical galvanic etch-stop in KOH using sodium hypochlorite
E.J. Connolly, S. Sakarya, P.J. French, X-H. Xia, J.J. Kelly
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review