@article{b799888e74b247caa9e57903f0eca644,
title = "A particle-in-cell plus Monte Carlo study of plasma-induced damage of normal incidence collector optics used in extreme ultraviolet lithography",
keywords = "Mathematics, Wiskunde en computerwetenschappen, Landbouwwetenschappen, Wiskunde: algemeen",
author = "R.C. Wieggers and W.J. Goedheer and M.R. Akdim and F. Bijkerk and P.A. Zegeling",
year = "2008",
language = "Undefined/Unknown",
volume = "103",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "1",
}